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Wafer guide with High-Precision Ball Screws
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Less backlash, less scrap: High-Precision Ball Screws optimize wafer guiding

Why ground Ball Screws ensure precise positioning of masks and wafers and help prevent process errors

Philipp Schmalzhaf

by Philipp Schmalzhaf, Sales Manager

Wafer guiding with Ball Screws

Precision at micrometer level: High-Precision Ball Screws for semiconductor manufacturing

In semiconductor manufacturing, just a few micrometers can determine whether a part is good or defective. Conventional drive solutions quickly reach their limits - for example due to mechanical backlash, uneven motion, or temperature variations. I&F High-Precision Ball Screws supplied by GROB provide a proven solution: they enable highly dynamic, repeatable positioning of wafers and masks in lithography, inspection, or handling systems.

High-Precision Ball Screws FEZG

High-Precision Ball Screws

High precision and reliability for sensitive semiconductor equipment

Thanks to precision-ground screws, tight tolerances, and optional preloaded nuts, backlash and positioning errors can be significantly reduced. For the design engineer, this means clearly defined requirements such as very high repeatability, minimal backlash, and stable process conditions are reliably met.

With their smooth operation, low friction, and long service life, these Ball Screws are ideal for cleanroom applications with high cycle rates. With measurement reports, verifiable quality, and personalized consulting, we also stand by you as a reliable partner - especially for sensitive microelectronics equipment.

FAQs about High-Precision Ball Screws

These ball screw types are manufactured with reduced axial play and high dimensional accuracy. This allows them to be used in machining centers or other systems requiring high precision.

C7 to C1 are common. C3–C1 are used for positioning tasks, C7–C5 for transport applications. The key factors are your requirements for screw length, backlash, repeatability, and load.

High-Precision Ball Screws have tighter tolerances, less backlash, and higher rigidity. They’re suitable for precise positioning tasks, whereas Standard Screws are more suited for simple feed and transport movements.

Preload eliminates backlash and increases rigidity and precision. It’s essential for positioning tasks but less relevant for transport purposes.

Rolled: cold-formed, cost-effective, medium precision.

Ground: precision-ground, offering the highest accuracy.

Whirled: formed by chip removal, faster than the ground version and more precise than the rolled variant.

Heavy-load types feature robust raceways and large balls. High-speed types use larger leads and special deflectors.

Shaft diameters from 4–300 mm, leads from 1–80 mm, lengths up to 12,000 mm (single-piece), and up to 22,000 mm (multi-piece assemblies).

Screws are made of induction-hardened special steel. Nuts are made from vacuum-carburized steel. This ensures durability and load capacity.

Service life can be calculated theoretically based on the bearing life formula. It depends on speed, load rating, and axial force.

DN = diameter × rotational speed. This formula helps calculate the maximum speed of the nut.

Various deflection systems (internal, external), flange shapes, multiple nuts, compact versions, and special threads.

Positioning types are preloaded (low backlash), transport types have backlash and are simpler—but not suitable for precise movement. High precision is also reflected in the purchase price.

Yes, there are single, double, and custom nuts. Replacement is usually straightforward with standard parts, and conditionally possible with special designs.

Typically via lubrication holes for oil or grease. Regular lubrication is crucial for service life and smooth operation.

Lateral forces must be strictly avoided. There should be no overconstraint from the screw bearings. Always mount or dismount the nut using a sleeve—otherwise, the balls may fall out.

Yes. There are miniature ball screws and compact designs with small outer diameters and shortened nuts—ideal for tight installation spaces.

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What is a High-Precision Ball Screw?

Would you like to understand how High-Precision Ball Screws work and what the differences are between the various types? In our learning article, we clearly explain what a High-Precision Ball Screw is, the different accuracy classes and designs available, how it works, and in which application areas it is used.

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